BEOL Compatible Superlattice FerroFET-based High Precision Analog Weight Cell with Superior Linearity and Symmetry

Keyphrases

• Superlattice 100%
• Back-end-of-line 100%
• Ferroelectric Field-effect Transistor (FeFET) 40%
• Ferroelectric Dielectric 40%
• In-memory 40%
• Nonlinearity 20%
• Potentiation 20%
• Online Learning 20%
• Fast Training 20%
• Non-ideality 20%
• Energy Efficiency 20%
• Enhanced Nonlinearity 20%
• Deep Neural Network 20%
• Training Accuracy 20%
• Indium Tungsten Oxide 20%
• Crossbar Array 20%
• Memory Access 20%
• Ferroelectric Capacitor 20%
• Training Time 20%
• Dielectric Stack 20%
• System-level Analysis 20%
• Ferroelectric Domain Structure 20%
• Array chip 20%
• DRAM Memory 20%
• On chip 20%
• Switching Speed 20%
• Monolithic 3D Integration 20%
• Learning Accuracy 20%
• Performance Parameters 20%
• Efficient Training 20%
• Gmax 20%
• Energy Training 20%
• Low Bit Precision 20%
• Conductance States 20%
• Oxide Transistor 20%
• Reduced Training 20%

Engineering

• Superlattice 100%
• Dielectrics 40%
• Energy Efficiency 20%
• Energy Conservation 20%
• Bit Precision 20%
• Monolithic 3d Integration 20%
• Graphics Processing Unit 20%
• Switching Speed 20%
• Performance Parameter 20%
• Memory Access 20%
• Domain Structure 20%
• Nonlinearity 20%
• Deep Neural Network 20%

Material Science

• Ferroelectric Material 100%
• Superlattice 100%
• Dielectric Material 40%
• Oxide Compound 20%
• Transistor 20%
• Indium 20%
• Tungsten 20%
• Capacitor 20%